AMAT P5000 System Parts ( 2nd source )

AMAT P5000 Parts ( 2nd source )

P/N	Description
0010-09261	BASIC CHAMBER 4,5,6"
0040-09136	CHAMBER 200MM BW
0020-09999	PLATE,FRONT,THROTTLE DR.
0020-30335	HOUSING,QTZ TUBE SACVD
0020-10135	MANIFOLD WATER PL
0020-30102	MANIFOLD, OUTPUT, SACVD
0010-09341	WAFER LIFT
0040-09095	GAS BOX **
0020-10192	*RING WAFER LIFT 200MM
0020-10119	PLATE PERF 100-150M
0020-09999	PLATE,FRONT,THROTTLE DR.
0020-10402	PUMPING PLATE, 200MM
0020-30335	HOUSING,QTZ TUBE SACVD
0020-10117	PLATE PERF OXIDE 200MM
3690-01676	SCREW MACH SHLDR
0040-09091	GAS BOX 456PL
0020-30108	CLAMP SHIELD NITRIDE
0020-30086	PLATE PERFORATED 150MM NITRIDE GIANT GAP
0020-10943	ISOLATOR TEFLON 200MM
0020-10721	COVER,SCREW,TEFLON THIN PERF PLATE
0020-10403	PUMP PLATE 4",5"&6" SILANE/OX
0020-10134	MANIFOLD OUTPUT PL
0020-09885	ISOLATOR N
0020-09602	MANIFOLD INPUT
0020-09307	BUSHING, MOUNTING
0020-30580	BLOCKER PERF COM SIL4-6"
0020-10936	BLOCKER PLATE,SILANE 200MM
0020-30797	wPLATE PERF 200MM GIANT GAP NITRIDE
0020-30090	CLAMP,SHIELD 200MM
0020-09135	SUPPORT HINGE LMP MODULE
0020-09270	COVER FRONT
0020-09307	BUSHING, MOUNTING
0020-09604	HOUSING
0020-09609	BUSHING TERMINAL
0020-10185	SUPPORT HOOP 200MM
0020-10186	COVER TOP 200MM
0020-10186	COVER TOP 200MM
0020-10759	COVER, FRONT
0021-10296	OUTPUT MNFLD,UNIV CH.,W/ALIGN. HOLES
0040-09096	VACPORT/SLIT WDW/HINGE SUPPORT-THNGSTEN
0040-09221	CHAMBER 200MM SACVD
0040-32073	GAS BOX, UNIVERSAL LID,W/ALIGNMENT HOLES
3880-01215	WSHR FLAT .375OD X .161ID X .062THK
3690-01676	SCREW MACH SHLDR
0020-10189	PLATE CONNECTOR 200M
0020-10192	*RING WAFER LIFT 200MM
0020-10936	BLOCKER PLATE,SILANE 200MM
0015-09055	BELLOWS ASSY SUSCEPTORHOLLOW
0015-09056	BELLOWS ASSY WAFER SOLID
0020-10059	RING,WAFER LIFT RP 0020-09844/0020-09183
0020-34606	PLATE,BLOCKER, .100 EH,UNIVERSAL CHAMBER
0020-10943	ISOLATOR TEFLON 200MM
0040-09699	CHAMBER, WXZ
0020-30407	PERF. PLATE 200MM BW
0020-10190	PLATE CONNECTOR SACVD / WB

Any interested in this article please feel free to contact me directly.

hkpark1015@gmail.com