AMAT ENDURA5500 Parts

PART NO.	Description
0020-20295	FRAME SOURCE 11.3"
0020-20164	COVER, INSULATOR SOURCE 11.3"
0020-21486	PLATE CONTACT DC SOURCE LEFT
0020-21488	PLATE CONTACT DC SOURCE RIGHT
0020-23442	water BOX &WATER LINE
0020-23441	BRKT PLUMBING MOTORIZED LIFT
0020-20913	HEATER AC BOX
0020-20914	COVER HTR AC PWR BOX
0020-28258	LIFTER HOOP
0020-23208	LIFTER FINGER
0020-22547	SOURCE ADAPTOR
0240-20022	EXTRA KITS
0020-25198	COVER RING ADV101 6" SST
0021-20572	PEDESTAL 6" ADV.101 FULL CVRG
0240-25480	RESET BUTTON KIT
0020-23621	SOURCE FRAME (G-12)
0020-23286	COVER, INSULATOR SOURCE (G-12)
0020-22980	PLATE CONTACT DC SOURCE LEFT
0020-22979	PLATE CONTACT DC SOURCE RIGHT
0020-22983	BRACKET PILLOW BLOCK
0020-22982	SOURCE ADAPTOR (G-12)-SUS
0020-28364	BLADE 6" ADV 101 SHUTTER
0020-28392	DISK,6" ADVANCED 101 SHUTTER
0021-76708	PEDESTAL CD/PT 150mm
0020-21219	BASE CD/PT 150mm
0020-21222	HOOP, CD/PT 150mm
0020-20716	FINGER, HOOP CD/PT 150mm
0010-21867	MANIFOLD PEDESTAL CD 150mm
0020-27124	PEDESTAL PC II 6" JMF/SMF
0020-20895	BASE HEATER 5/6" DEGAS
0020-20896	REFLECTOR HEATER 5/6" DEGAS
0020-20897	SOCKET RETAINER 5/6" DEGAS
0020-20898	COVER,ELECTRICAL 5/6" DEGAS
0020-20899	HEAT SHIELD, 5/6" DEGAS
0020-20910	BUSS BAR UPPER 5/6" (Ag)

0020-20911	BUSS BAR ,LOWER 5/6" (Ag)
0020-21261	GUIDE SHAFT ORIENTER
0020-22363	SHAFT,LIFTER, T/C
0020-22910	BASIC BELLOWS
0020-20431	COUMATOR 6"
0020-20784	TC HOLDER
0020-23593	PLATE 6" CCD VACUUM SEAL, REVISIED
0020-21704	CHUCK ORIENTER 5"
0020-22362	6" LIFTER TC
0020-22361	PLATE TC BOX
0020-20452	CASSETTE STAGE ASS'Y (RH&LH)-AUTO
0020-21112	CLAMP, 6"BLADE BUFFER ROBOT
0020-21113	CAP 6" BUFFER ROBOT
0020-21114	BLADE, 6" BUFFER ROBOT
0020-20354	CAP,6" TRANSFER BLADE FROG LEG
0020-21024	CLAMP, 6"BLADE TRANSFER FROG LEG
0020-21033	BLADE, 6" TRANSFER FROG LEG
0040-13378	ROBOT ARM ASS,Y(HP PLUS)
0020-21069	HINGE
0020-13126	COVER DC,LOWER,FRAME RETAROANT (G-12)
0020-76072	ARM, WLDMT SOURCE CHMBR

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