2014년 5월 19일 월요일

AMAT Cable list

Description Part Number
PCB ASSY STEC MFC ADAPTOR METCH MXP 0100-35102
MFC/CHMBR LINE TEMP SNSR H2O VDSII 0090-09056
CABLE ASSY, DOOR SW, UHP 0090-09137
CABLE ASSY, PHOTO HELIX 2, UHP 0090-09139
SENSOR ASSY,VALVE SENSOR AND HARNESS 0090-20003
ASSY, MAGNETIC SWITCH 0090-35002
ASSY,ELECT,INTLK,RF MATCH,DPS 0090-36219
HARNESS ASSY, ETCH COVER INTERLOCK 0140-00457
HARNESS ASSY,CHAMBER,SUPER-E/EMXP+,C2 0140-01479
HRNS ASSY MF INTRCONN IMP PVD CHMBR WB-M 0140-01918
  0140-01919
HARNESS ASSYW/SHIELD, DUAL ZONE, IHC, MC 0140-03220
HARNESS ASSY, RIGHT CHANNEL, DPN CHAMBER 0140-04710
ASSY HARNESS ETCH COVER INTERLOCK 0140-09025
HARNESS ASSY COVER SW INTERLOCK 0140-09122
HARNESS ASSY CVD LIFT RESISTORS 0140-09169
HARNESS ASSY, SUPPLY INTERFACE RIBBONS 0140-09459
HARN ASSY, WAVEGUIDE FLANGE, LOWER, ASP 0140-09476
HARNESS,MAIN,ASP CHAMBER,METCH MXP CENTU 0140-09663
PRESS. TRANSD. HRN 1-6 0140-09996
HARNESS ASSY, EXHAUST INTERLOCK 0140-10033
PRESS. TRANS. HRN 11-13 0140-10034
HARNESS, PRESSURE TRANSDUCER, 7-10 0140-10035
HARNESS ASSY, VALVE SENSORS, DPS CHAMBER 0140-10114
HARNESS ASSY, CATHODE MAINT RIGHT, DPS CH 0140-10115
HARNESS, PHEUMATIC, MAINTENANCE CONTROL 0140-10270
HARNESS ASSY,TURBO INTERCONNECT,LEYBOLD 0140-10280
HARN ASSY CONT REMOTE GAS AO/AI DI/DO 0140-20205
HARNESS ASSY,LLC A WAFER MAP SENSE L/R 0140-20253
HARNESS ASSY., LLC B WAFER MAP SENSE L/R 0140-20254
HARNESS ASSY L LOCK WAFER SENSORS 0140-20494
HARNESS ASSY LID UP-DOWN AT PANEL 0140-20508
HARNESS SYSTEM AC CONTROLER TO RGB 0140-20713
OBS CABLE ASSY TRANSFER CH# RESOLVER 0140-20823
CABLE ASSY TRANSFER CH 0140-20825
VHP BOX AC CABLE 0140-20830
HARNESS ASSY, XFER CH RETROFIT 0140-20835
VHP XFR LID HARNESS 0140-20882
HARNESS ASSY, LAMP POWER ON, 75FT 0140-20932
HARNESS ASSY, HEATER DRIVER, CVD-AL 0140-21034
HARN ASSY, POWER, N2 HTR CVD-RGB 0140-21053
HARNESS ASSY HIGH-EFFCIENCY MATCH /WTR F 0140-21406
HARNESS ASSY 2MHZ RF MATCH/WTR FLOW INTL 0140-21407
HARNESS ASSY PVD W/B CH INTERCONN 0140-21408
HARNESS ASSY, CHAMBER, TXZ AND AXZ 0140-21826
  0140-21865
HARNESS ASSY, BULKHEAD TO ORIENTER CENTU 0140-35104
HARNESS ASSY, VALVE SENSORS, DPS CHAMBER 0140-35534
HARNESS ASSY, LEFT CHANNEL, DPS CHAMBER 0140-35791
MAIN HARNESS,DPS CHAMBER,CENTURA 0140-35961
HARNESS ASSY SEIKO STPH13033C INTERCONNE 0140-35964
HARNESS, SLIT LINER DOOR OPTO SW II 0140-38353
HARN ASSY,DRIVER ENCODR HOME SENSORS 0140-40239
HARN ASSY, COOLDOWN CHAMBER 0140-70234
HARN ASSY, SMIF 24V KICK PANEL TO PCB 0140-70413
HARNESS ASSEMBLY, SMIF EMO INTERCONNECT 0140-70414
HARN ASSY, PH II FAC 0140-70416
DPS, POLY, HARNESS, CATHODE MAINT. 0140-70500
  0140-70524
HP ROBOOT CONTROL POWER CABLE HANNESS CABLE 0140-70525
HARN ASSY LOAD LOCK DOOR  SENSORS 0140-75000
  0140-76127
HARNESS ASSY, INTERCONNECT CH. W/B 0140-76222
HARNESS, VHP TRANS CH DD MOTOR END 0140-76327
  0140-76833
H/A, SMIF INTEGRATED WB LLA INTRCNT PHAS 0140-76877
H/A, SMIF INTEGRATED WB LLB INTRCNT PHAS 0140-76878
  0150-00482
CABLE ASSY, 40FT, M/F EMO UMIBLICAL 0150-00584
CABLE ASSY.SMP RF MATCH CNTRL,SERIPLEX,C 0150-00603
  0150-00915
  0150-00947
  0150-00979
ASSY CABLE HEAT EXCHGR INTRFC 0150-09027
HARNESS ASSY LIMIT SWITC 0150-09099
CABLE ASSY, RF GENERATOR 0150-09240
CABLE ASSY,MAG GEN INTER CONNECT,55',ASP 0150-09758
CABLE ASSY, DISPLAY INTERCONNECT,ASP 0150-09783
CABLE,MOTOR DRIVE WXZ 0150-10073
MFC CBL 9-PIN 0150-10232
EV MANIFOLD CBL 0150-10233
CBL I/O PWR. DIST. 0150-10328
CABLE,LID/COVER INTERLOCK SW,DXZ 0150-10454
C/A, APC GAS PANEL CNTLR, INTC, 55FT EMC 0150-10504
CABLE ASSY, EMC, APC, GAS PANEL, COMM, 0150-10505
C/A, SYSTEM MONITOR, 55FT EMC COMP 0150-10506
CABLE ASSY, STEPPER X INTERCONNECT, 25' 0150-20021
CABLE ASSY, STEPPER Y INTERCONNECT, 25' 0150-20022
CABLE ASSY, CASSETTE INDEXER INTERCONNEC 0150-20028
CABLE ASSY, BUFFER ROBOT INTERCONNECT, 2 0150-20029
CABLE ASSY, 24V POWER INTERCONNECT 0150-20031
CABLE ASSY, 15V POWER INTERCONNECT 0150-20032
CABLE ASSY. SUPPLY CONTROL 0150-20061
CABLE ASSY EMO MAIN AC TO SYSTEM AC 0150-20074
CABLE ASSY ORIENTER UMBILICAL 0150-20102
CABLE ASSY, EMO GENERATOR 1/2 INT. 0150-20112
CABLE ASSY, TURBO CONTROL BULKHEAD INT. 0150-20126
CABLE ASSY,EMO INTERCONN SYS. AC/MAIN FR 0150-20181
CABLE ASSY GAS DI/DO EXTERNAL INTERCONNE 0150-20192
HARNESS ASSY, TC INTERFACE 0150-20197
CABLE ASSY., FINAL VAL EXTERNAL INTL 0150-20209
CABLE ASSY,HEAT EXCHANGR 0150-20227
CABLE ASSY.,LLA LED PWR 0150-20238
CABLE ASSY., LLB LED PXR 0150-20239
CABLE ASSY,LLA WAFER MAP CASS.SENSE 0150-20509
CABLE ASSY,LLB WAFER MAP/CASS. SENSE 0150-20510
CABLE ASSY, VME CDGE DI/DO8 0150-20517
CABLE ASSY,PUMP CONTROL CH C 0150-20537
CABLE ASSY,EMO MAIN AC TO SYS AC-75FT 0150-20555
CABLE ASSY, EMO INTCNT- 75FT 0150-20556
CABLE ASSY A/B PUMP STD INTF 0150-20574
CABLE ASSY MONOLITH PUMP 0150-20575
CABLE ASSY 2-PHS DRVR OUT MTR 0150-20580
CL ASSY PUMP INTFC CH D PC 0150-20585
CABLE ASSY SYS EXP FAIL INVTR DIO 0150-20610
CABLE ASSY SYS EXP FAIL INVTR SYSBACK 0150-20611
CABLE ASSY 2-PHASE DRIVER OUTPUT 0150-20640
CABLE ASSY FINAL VLV/INTLK DI REMOTE 0150-20716
CABLE ASSY GAS BOX INTERLOCK 0150-20719
CABLE ASSY  75' EXT INTERCONNECT 0150-21082
CABLE ASSY, CASSETTE INDEXER INTCNT-40FT 0150-21129
CABLE ASSY STEPPER DRIVER DIST. 0150-21171
CABLE ASSY DIRECT DRIVE BOX I/O 0150-21183
CABLE ASSY TOP TRANSFER 0150-21184
GAS INTERCONNECT 0150-21338
CHAMBER A/B INTERCONNECT, (EMC COMPLIANT 0150-21339
CHAMBER 2 INTERCONNECT 0150-21340
CHAMBER 3 INTERCONNECT, (EMC COMPLIANT) 0150-21341
CHAMBER 4 INTERCONNECT, (EMC COMPLIANT) 0150-21342
MAIN FRAME INTERCONNECT 0150-21343
CHAMBER D INTERCONNECT, (EMC COMPLIANT) 0150-21344
CRYO TEMP INTERCONNECT, (EMC COMPLIANT) 0150-21345
ENCODER INTERCONNECT, (EMC COMPLIANT) 0150-21346
ORIENTOR UMBILICAL, (EMC COMPLIANT) 0150-21347
SEC GENERATOR RACK INTERCONNECT, (EMC CO 0150-21348
CHAMBER C INTERCONNECT 0150-21357
CHAMBER C INTERCONNECT, (EMC COMPLIANT) 0150-21358
CABLE, ASSY DC POWER/INTERLOCK'S RGB 0150-21366
  0150-21367
CABLE ASSY REM DC PWR INTCON 75 FT 0150-21418
CABLE ASSY RF GEN DC PWR INTCON CEM 96 0150-21419
CABLE ASSY REM 1 INTCON 75 FT -CEM 96 0150-21420
CABLE ASSY REM 2 INTCON 75 FT -CEM 96 0150-21421
CABLE ASSY MAIN FRAME PUMP CONT CEM 96 0150-21422
CABLE ASSY 75' NESLAB INTCT CEM 96 0150-21423
CABLE ASSY 75 FT TURBO CTRL CEM 96 0150-21424
CABLE, GAS AO/AI EXTERNAL 50FT 0150-21706
  0150-21729
CABLE, STEPPER X-AXIS, 50FT 0150-21764
CABLE ASSY, HEAT EXCHANGER, 75FT 0150-21767
CABLE ASSY, GASBOX TO GASBOX INTERCONNEC 0150-21772
  0150-21776
  0150-21875
CABLE ASSY, WATER LEAK DET 2 GEN 0150-21890
C/A GROUND- SOURCE RETURN AND WATER MANI 0150-22734
HARNESS ASSY PNEUMATICS UMBILICAL 0150-35209
HARNESS ASSY CHAMBR A-B- C-D 0150-35210
C/A MAIN FRAME UMBILICAL CMJ2 LONG 0150-35309
C/A CBL COMB 20AWG LONG 0150-35311
C/A GAS PANEL POWER LONG 0150-35314
CABLE ASSY TC GAUGE CENTURA 0150-35432
CABLE ASSY, PC ENDPT CHA/B/C/D INTFC 15 0150-35447
  0150-35665
C/A, EMC COMP., HEAT EXCHANGER, 75FT CSI 0150-35740
CABLE ASSY. DOME UMBILICAL #1 CENTURA 0150-35999
CABLE ASSY,RF MATCH CONTROL,DPS 0150-36035
CABLE ASSY,ESC HV INTERFACE,DPS 0150-36036
CABLE ASSY,TC INTERFACE,DPS 0150-36037
CABLE,RF MATCH CNTRL,SERIPLEX,DPS 0150-36190
CABLE,SERIPLEX COMM,SOURCE MATCH CNTRL 0150-36476
CABLE ASSY,FAC-PANEL TO E-DTCU 0150-38927
CABLE, COVER INTERLOCK - SLIT LINER DOOR 0150-39000
CABLE ASSY,DIAGNOSTIC,HE MATCH TO HV MOD 0150-39389
CABLE ASSY, N2 PURGE MFC PIGTAIL 0150-76014
EMC COMP.,HARNESS ASSY MAIN FRAME 0150-76179
EMC COMP.,25FT CABLE CHAMBER A-B-C-D 0150-76184
EMC COMP., CABLE ASSY, GAS PANEL #2 UMBI 0150-76205
EMC COMP.,CABLE ASSY,SYSTEM MONITOR,EXTE 0150-76213
EMC COMP., OPER PANEL, EXTENDED 46 FT. 0150-76217
CABLE ASSY, VHP TRANS CH MF DD MOTOR 0150-76238
CABLE ASSY, ANALOG SYNC EXT., FAST 0150-76428
CABLE ASSY, MAIN FRAME UMBILICAL #2,25.5 0150-76513
CABLE, DRIVER I/O INTERCONNECT CENTURA 0150-76657
CABLE ASSEMBLY,ROBOT CONTROL 40FT. EMC C 0150-76735
C/A ROBOT CONTROL, 60FT.-EMC COMP 0150-76758
CABLE ASSY MF, PNEU DIST TO GAS INTLK, J 0150-76816
  0150-76833
  0150-76834
  0150-76836
CABLE ASSY, RF GEN DC PWR INTCNT, 50FT 0150-76850
  0150-76861
C/A SMIF INTRLOCK PCB TO KICKPANEL ASYST 0150-76863
C/A SMIF INTRLOCK PCB TO KICKPANEL ASYST 0150-76864
C/A SMIF INTRLOCK PCB TO KICKPANEL JENOP 0150-76865
C/A SMIF INTRLOCK PCB TO KICKPANEL JENOP 0150-76866
C/A 15 COND, UMBILICAL 40.00 FT., EMC CO 0150-76870
CABLE ASSY, 50 COND UMBILICAL, 40FT EMC 0150-76871
CABLE ASSY, 50 COND UMBILICAL, 60FT EMC 0150-76873
CABLE ASSY, TRANS CH MF DIR DRVR RSLVR 4 0150-97368
  0620-02336
  0620-02383
  0620-02384
  0620-20403



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AMAT MxP System parts (2nd source)

AMAT MXP System Parts

P/N Description


0020-34031 SUPPORT, PEDESTAL,SHORTENED, SIMPLE CATH
0020-34031 SUPPORT, PEDESTAL,SHORTENED, SIMPLE CATH
0020-34035 SUPPORT, LIFT CYLINDER, SIMPLE CATHODE
0020-34044 BLOCK, RF INSULATOR, BOTTOM
0040-31846 COVER, ACCESS, HELIUM AND WATER LINES
0040-31845 COVER, CYLINDER SUPPORT
0020-34030 BASE,PEDESTAL,ESC,SIMPLE  CATHODE
0020-34034 CYLINDER,LIFTER,ETCH CHAMBER
0020-34048 SUPPORT, BELLOWS
0020-30347 CYLINDER, EXTERNAL,
0020-09029 COVERING PIPE
0040-09005 BASE STD CATHODE NOT REPAIRABLE
0200-10246 UNI-INSERT,GDP,LINER,88 HOLD, QTZ

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2014년 5월 18일 일요일

AMAT P5000 System Parts ( 2nd source )

AMAT P5000 Parts ( 2nd source )

P/N Description
0010-09261 BASIC CHAMBER 4,5,6"
0040-09136 CHAMBER 200MM BW
0020-09999 PLATE,FRONT,THROTTLE DR.
0020-30335 HOUSING,QTZ TUBE SACVD
0020-10135 MANIFOLD WATER PL
0020-30102 MANIFOLD, OUTPUT, SACVD
0010-09341 WAFER LIFT
0040-09095 GAS BOX **
0020-10192 *RING WAFER LIFT 200MM
0020-10119 PLATE PERF 100-150M
0020-09999 PLATE,FRONT,THROTTLE DR.
0020-10402 PUMPING PLATE, 200MM
0020-30335 HOUSING,QTZ TUBE SACVD
0020-10117 PLATE PERF OXIDE 200MM
3690-01676 SCREW MACH SHLDR
0040-09091 GAS BOX 456PL
0020-30108 CLAMP SHIELD NITRIDE
0020-30086 PLATE PERFORATED 150MM NITRIDE GIANT GAP
0020-10943 ISOLATOR TEFLON 200MM
0020-10721 COVER,SCREW,TEFLON THIN PERF PLATE
0020-10403 PUMP PLATE 4",5"&6" SILANE/OX
0020-10134 MANIFOLD OUTPUT PL
0020-09885 ISOLATOR N
0020-09602 MANIFOLD INPUT
0020-09307 BUSHING, MOUNTING
0020-30580 BLOCKER PERF COM SIL4-6"
0020-10936 BLOCKER PLATE,SILANE 200MM
0020-30797 wPLATE PERF 200MM GIANT GAP NITRIDE
0020-30090 CLAMP,SHIELD 200MM
0020-09135 SUPPORT HINGE LMP MODULE
0020-09270 COVER FRONT
0020-09307 BUSHING, MOUNTING
0020-09604 HOUSING
0020-09609 BUSHING TERMINAL
0020-10185 SUPPORT HOOP 200MM
0020-10186 COVER TOP 200MM
0020-10186 COVER TOP 200MM
0020-10759 COVER, FRONT
0021-10296 OUTPUT MNFLD,UNIV CH.,W/ALIGN. HOLES
0040-09096 VACPORT/SLIT WDW/HINGE SUPPORT-THNGSTEN
0040-09221 CHAMBER 200MM SACVD
0040-32073 GAS BOX, UNIVERSAL LID,W/ALIGNMENT HOLES
3880-01215 WSHR FLAT .375OD X .161ID X .062THK
3690-01676 SCREW MACH SHLDR
0020-10189 PLATE CONNECTOR 200M
0020-10192 *RING WAFER LIFT 200MM
0020-10936 BLOCKER PLATE,SILANE 200MM
0015-09055 BELLOWS ASSY SUSCEPTORHOLLOW
0015-09056 BELLOWS ASSY WAFER SOLID
0020-10059 RING,WAFER LIFT RP 0020-09844/0020-09183
0020-34606 PLATE,BLOCKER, .100 EH,UNIVERSAL CHAMBER
0020-10943 ISOLATOR TEFLON 200MM
0040-09699 CHAMBER, WXZ
0020-30407 PERF. PLATE 200MM BW
0020-10190 PLATE CONNECTOR SACVD / WB


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2014년 5월 8일 목요일

AMAT ENDURA5500 Parts

PART NO.

Description

0020-20295 FRAME SOURCE 11.3"
0020-20164 COVER, INSULATOR SOURCE 11.3"
0020-21486 PLATE CONTACT DC SOURCE LEFT
0020-21488 PLATE CONTACT DC SOURCE RIGHT
0020-23442 water BOX &WATER LINE
0020-23441 BRKT PLUMBING MOTORIZED LIFT
0020-20913 HEATER AC BOX
0020-20914 COVER HTR AC PWR BOX
0020-28258 LIFTER HOOP
0020-23208 LIFTER FINGER
0020-22547 SOURCE ADAPTOR
0240-20022 EXTRA KITS
0020-25198 COVER RING ADV101 6" SST
0021-20572 PEDESTAL 6" ADV.101 FULL CVRG
0240-25480 RESET BUTTON KIT
0020-23621 SOURCE FRAME (G-12)
0020-23286 COVER, INSULATOR SOURCE (G-12)
0020-22980 PLATE CONTACT DC SOURCE LEFT
0020-22979 PLATE CONTACT DC SOURCE RIGHT
0020-22983 BRACKET PILLOW BLOCK
0020-22982 SOURCE ADAPTOR (G-12)-SUS
0020-28364 BLADE 6" ADV 101 SHUTTER
0020-28392 DISK,6" ADVANCED 101 SHUTTER
0021-76708 PEDESTAL CD/PT 150mm
0020-21219 BASE CD/PT 150mm
0020-21222 HOOP, CD/PT 150mm
0020-20716 FINGER, HOOP CD/PT 150mm
0010-21867 MANIFOLD PEDESTAL CD 150mm
0020-27124 PEDESTAL PC II 6" JMF/SMF
0020-20895 BASE HEATER 5/6" DEGAS
0020-20896 REFLECTOR HEATER 5/6" DEGAS
0020-20897 SOCKET RETAINER 5/6" DEGAS
0020-20898 COVER,ELECTRICAL 5/6" DEGAS
0020-20899 HEAT SHIELD, 5/6" DEGAS
0020-20910 BUSS BAR UPPER 5/6" (Ag)
0020-20911 BUSS BAR ,LOWER 5/6" (Ag)
0020-21261 GUIDE SHAFT ORIENTER
0020-22363 SHAFT,LIFTER, T/C
0020-22910 BASIC BELLOWS
0020-20431 COUMATOR 6"
0020-20784 TC HOLDER
0020-23593 PLATE 6" CCD VACUUM SEAL, REVISIED
0020-21704 CHUCK ORIENTER 5"
0020-22362 6" LIFTER TC
0020-22361 PLATE TC BOX
0020-20452 CASSETTE STAGE ASS'Y (RH&LH)-AUTO
0020-21112 CLAMP, 6"BLADE BUFFER ROBOT
0020-21113 CAP 6" BUFFER ROBOT
0020-21114 BLADE, 6" BUFFER ROBOT
0020-20354 CAP,6" TRANSFER BLADE FROG LEG
0020-21024 CLAMP, 6"BLADE TRANSFER FROG LEG
0020-21033 BLADE, 6" TRANSFER FROG LEG
0040-13378 ROBOT ARM ASS,Y(HP PLUS)
0020-21069 HINGE
0020-13126 COVER DC,LOWER,FRAME RETAROANT (G-12)
0020-76072 ARM, WLDMT SOURCE CHMBR


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