Cooldown Chamber set

Cooldown Chamber (0010-93287) Set

P/N                         Description

0040-01101              Chamber Body
0040-04750              Chamber Lid
0040-04940              Lift Hoop
0035-00087               Wafer Lift Mounting Block
0020-39201               Mounting Block Cover
0021-08118               Water Cover
0040-04939               Pedestal Cool-down
0040-20133               Cool-down Flange
0021-03724               Center Find Flange
0020-09064               Window Flange
0200-09005               Quartz Window
3020-01126               Air Cylinder
3220-01051               Floating Joint Coupling
3300-03408               Elbow Tubing Fitting
0020-33779               Housing Bushing
0020-20930               Bracket MAG Switch

Ceramic Parts available

Ceramic Parts ( 2nd Source ) - Lead time : 2 weeks

Part#	Description
0200-00005	INSLTR, TBG WXZ 300MM
0200-00009	SUSCEPTOR, NO CENTER, .120THK, SGL CARBO
0200-00011	QUARTZ RING 100MM XTAL
0200-00012	RING QUARTZ, 5
0200-00014	COVER, QUARTZ 100MM XTAL
0200-00015	QUARTZ COVER 125MM
0200-00016	COVER,QUARTZ 150MM XTAL
0200-00018	COLLAR, PEDESTAL 100MM OX/MLR REGULAR
0200-00019	COLLAR, PEDESTAL 125MM OX/MLR REGULAR
0200-00020	QUARTZ RING 150MM OXIDE
0200-00021	wCOLLAR, PEDESTAL,125MM SPECIAL I OX/MLR
0200-00025	GAS RING 100-200MM MLR S
0200-00028	COVER RING QTZ 8 3-HOLE
0200-00032	INJECTOR, GAS, UNIVERSAL, 20-DEG, EMAX
0200-00033	WINDOW, EXTERNAL, QUICK RELEASE,ENDPOINT
0200-00034	wCOVER, QTZ 5 POLY 40THK
0200-00036	RING COVER
0200-00037	RING QTZ 8   .165 THK
0200-00038	RING, CLAMPING, 100MM RIGID, 3/16 THK OX
0200-00039	CLAMPING RING 150 MM
0200-00042	COVER, QUARTZ, POLY, 100MM
0200-00043	QUARTZ COVER 6" POLY .40
0200-00044	RING,QTZ PEDESTAL 150MM
0200-00045	RING,CLAMPING 100MM MLR
0200-00046	RING, 150MM MLR COPLANAR LOWER
0200-00047	RING, CLAMPING MLR 150MM
0200-00048	RING CLAMPING MLR,125MM
0200-00049	RING,125MM MLR,COPLANAR (LOWER)
0200-00050	RING,PEDESTAL 125MM REG. MLR COPLANAR
0200-00051	WINDOW, LID ENDPOINT, QTZ. EMAX 200MM