AMAT EPI Process kit

AMAT EPI Process Kit available 

0200-35019   INSERT, QTZ INJECT

0200-35020   BAFFLE, QTZ INJECT

0200-35424   SHAFT WAFER LIFT 200MM MAG COUPLED ROTAT

0200-00412   SHAFT,SUSCEPTOR,W/RMVBL PINS,NO CEN,EPI

0200-35042   DOME, LOWER QTZ, W/BALL

0200-35688   LOWER LINER

0200-35024   CHAMBER LINER,QTZ UPPER

0200-35084   DOME, UPPER ATM



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