PCB List
0010-20138 TC AMP BD
0100-20243 Vac Pump Interface BD
0100-35103 M/W Generator Interlock BD
0100-20063 TC Gauge BD
0100-76038 Wafer Fast Map LED BD
0100-20000 AI Mux BD
0100-20152 System Expansion BD
0100-20011 CHAMBER A/B INTERCONNECT BD
0100-20244 Step Distribution BD TXZ
0100-20010 STEC MFC Interconnect BD
0100-20004 CH# Interconnect BD
0100-20313 CH# Interconnect BD IMP
0100-09086 Stepper Power Drive BD
0100-35192 DPS Maintenance Control BD
0100-35116 DPS CH# Interconnect BD Pos.A,C
0100-35117 DPS CH# Interconnect BD Pos.B,D
0100-35066 Pneumatic Interconnect BD
0100-20073 Wafer Detect BD (LL Right, Left)
0100-09255 ASP TC Interface BD
0100-09213 ASP LED Display BD
0100-09222 ASP CHBR Interface BD
0100-20012 ISO AMP BD
0100-20038 Relay Control BD
0100-00245 Ch# Tray Cntrllr Interconnect BD
0100-00246 Ch# Tray Chbr Interconnect BD
0660-01088 Floppy Disk Driver
0100-35217 TC AMP Interlock BD
0100-20371 Interlock Status BD
0100-01792 5PH STEPPER DRIVER INTERFACE BD
0100-20206 REMOTE GAS BOX INTERCONNECT BD
0100-20143 LOADLOCK WAFER SENSOR BD
0100-35082 MXP CH# INTERCONNECT BD
0100-09042 AME PHOTO SENSOR
0100-09213 ASP DISPLAY BD
0100-35250 CH# INTERFACE BD
0100-09033 ASSY TC AMP HSNG
0100-00215 AC DISTRIBUTION BD
0100-09204 VDS(2) CONTROL BD
0100-09205 VDS(2) INTERCONNECT BD
0100-35116 CH# INTERCONNECT BD
1140-01312 SMIF DC POWER SUPPLY BD
0100-18034 CVD CH# PNEUMATIC INTERCONNECT BD
0100-01792 2P STEPPER DRIVER INTERFACE BD
0190-70103 MONITOR LIGHT PEN INTERCONNECT BD
0100-18062 CH# INTERCONNECT BD ULTIMA
0100-01098 LD DRIVER BD
0100-76208 WAFER ORIENTER BD
0100-09205 WV INTERCONNECT BD
0100-18051 TC FILTER BD
0100-20304 MUTUAL INTERLOCK BD
0100-35060 CH# POWER DISTRIBUTION BD
0100-20098 DUAL DEGAS DRV BD
0100-00262 LOW FREQ BOT MODULE BD
0100-00413 LINE FILTER BOT PWR BD
0100-20016 PNEUMATIC 3WAY INT'R BD
0100-20028 ENCODER INT'R BD
0100-76018 PNEUMATIC 4WAY INT'R BD
0100-20042 PNEUMATIC SLIT VALVE INT'R BD
0100-20015 CONVECTRON GAUGE INT'R BD
0100-20086 WAFER MAP LED BD
0100-20040 REMOTE SUPPLY DIST BD
Have any other inquiry or need more information, just feel free to contact me directly.
hkpark1015@gmail.com
