| Part# | Description |
| 0200-00005 | INSLTR, TBG WXZ 300MM |
| 0200-00009 | SUSCEPTOR, NO CENTER, .120THK, SGL CARBO |
0200-00011 |
QUARTZ RING 100MM XTAL |
0200-00012 |
RING QUARTZ, 5 |
0200-00014 |
COVER, QUARTZ 100MM XTAL |
0200-00015 |
QUARTZ COVER 125MM |
0200-00016 |
COVER,QUARTZ 150MM XTAL |
0200-00018 |
COLLAR, PEDESTAL 100MM OX/MLR REGULAR |
0200-00019 |
COLLAR, PEDESTAL 125MM OX/MLR REGULAR |
0200-00020 |
QUARTZ RING 150MM OXIDE |
| 0200-00021 | wCOLLAR, PEDESTAL,125MM SPECIAL I OX/MLR |
0200-00025 |
GAS RING 100-200MM MLR S |
0200-00028 |
COVER RING QTZ 8 3-HOLE |
0200-00032 |
INJECTOR, GAS, UNIVERSAL, 20-DEG, EMAX |
| 0200-00033 | WINDOW, EXTERNAL, QUICK RELEASE,ENDPOINT |
0200-00034 |
wCOVER, QTZ 5 POLY 40THK |
0200-00036 |
RING COVER |
0200-00037 |
RING QTZ 8 .165 THK |
0200-00038 |
RING, CLAMPING, 100MM RIGID, 3/16 THK OX |
0200-00039 |
CLAMPING RING 150 MM |
0200-00042 |
COVER, QUARTZ, POLY, 100MM |
0200-00043 |
QUARTZ COVER 6" POLY .40 |
0200-00044 |
RING,QTZ PEDESTAL 150MM |
0200-00045 |
RING,CLAMPING 100MM MLR |
0200-00046 |
RING, 150MM MLR COPLANAR LOWER |
0200-00047 |
RING, CLAMPING MLR 150MM |
0200-00048 |
RING CLAMPING MLR,125MM |
0200-00049 |
RING,125MM MLR,COPLANAR (LOWER) |
0200-00050 |
RING,PEDESTAL 125MM REG. MLR COPLANAR |
0200-00051 |
WINDOW, LID ENDPOINT, QTZ. EMAX 200MM |
| Description | Part Number |
| PCB ASSY STEC MFC ADAPTOR METCH MXP | 0100-35102 |
| MFC/CHMBR LINE TEMP SNSR H2O VDSII | 0090-09056 |
| CABLE ASSY, DOOR SW, UHP | 0090-09137 |
| CABLE ASSY, PHOTO HELIX 2, UHP | 0090-09139 |
| SENSOR ASSY,VALVE SENSOR AND HARNESS | 0090-20003 |
| ASSY, MAGNETIC SWITCH | 0090-35002 |
| ASSY,ELECT,INTLK,RF MATCH,DPS | 0090-36219 |
| HARNESS ASSY, ETCH COVER INTERLOCK | 0140-00457 |
| HARNESS ASSY,CHAMBER,SUPER-E/EMXP+,C2 | 0140-01479 |
| HRNS ASSY MF INTRCONN IMP PVD CHMBR WB-M | 0140-01918 |
| 0140-01919 | |
| HARNESS ASSYW/SHIELD, DUAL ZONE, IHC, MC | 0140-03220 |
| HARNESS ASSY, RIGHT CHANNEL, DPN CHAMBER | 0140-04710 |
| ASSY HARNESS ETCH COVER INTERLOCK | 0140-09025 |
| HARNESS ASSY COVER SW INTERLOCK | 0140-09122 |
| HARNESS ASSY CVD LIFT RESISTORS | 0140-09169 |
| HARNESS ASSY, SUPPLY INTERFACE RIBBONS | 0140-09459 |
| HARN ASSY, WAVEGUIDE FLANGE, LOWER, ASP | 0140-09476 |
| HARNESS,MAIN,ASP CHAMBER,METCH MXP CENTU | 0140-09663 |
| PRESS. TRANSD. HRN 1-6 | 0140-09996 |
| HARNESS ASSY, EXHAUST INTERLOCK | 0140-10033 |
| PRESS. TRANS. HRN 11-13 | 0140-10034 |
| HARNESS, PRESSURE TRANSDUCER, 7-10 | 0140-10035 |
| HARNESS ASSY, VALVE SENSORS, DPS CHAMBER | 0140-10114 |
| HARNESS ASSY, CATHODE MAINT RIGHT, DPS CH | 0140-10115 |
| HARNESS, PHEUMATIC, MAINTENANCE CONTROL | 0140-10270 |
| HARNESS ASSY,TURBO INTERCONNECT,LEYBOLD | 0140-10280 |
| HARN ASSY CONT REMOTE GAS AO/AI DI/DO | 0140-20205 |
| HARNESS ASSY,LLC A WAFER MAP SENSE L/R | 0140-20253 |
| HARNESS ASSY., LLC B WAFER MAP SENSE L/R | 0140-20254 |
| HARNESS ASSY L LOCK WAFER SENSORS | 0140-20494 |
| HARNESS ASSY LID UP-DOWN AT PANEL | 0140-20508 |
| HARNESS SYSTEM AC CONTROLER TO RGB | 0140-20713 |
| OBS CABLE ASSY TRANSFER CH# RESOLVER | 0140-20823 |
| CABLE ASSY TRANSFER CH | 0140-20825 |
| VHP BOX AC CABLE | 0140-20830 |
| HARNESS ASSY, XFER CH RETROFIT | 0140-20835 |
| VHP XFR LID HARNESS | 0140-20882 |
| HARNESS ASSY, LAMP POWER ON, 75FT | 0140-20932 |
| HARNESS ASSY, HEATER DRIVER, CVD-AL | 0140-21034 |
| HARN ASSY, POWER, N2 HTR CVD-RGB | 0140-21053 |
| HARNESS ASSY HIGH-EFFCIENCY MATCH /WTR F | 0140-21406 |
| HARNESS ASSY 2MHZ RF MATCH/WTR FLOW INTL | 0140-21407 |
| HARNESS ASSY PVD W/B CH INTERCONN | 0140-21408 |
| HARNESS ASSY, CHAMBER, TXZ AND AXZ | 0140-21826 |
| 0140-21865 | |
| HARNESS ASSY, BULKHEAD TO ORIENTER CENTU | 0140-35104 |
| HARNESS ASSY, VALVE SENSORS, DPS CHAMBER | 0140-35534 |
| HARNESS ASSY, LEFT CHANNEL, DPS CHAMBER | 0140-35791 |
| MAIN HARNESS,DPS CHAMBER,CENTURA | 0140-35961 |
| HARNESS ASSY SEIKO STPH13033C INTERCONNE | 0140-35964 |
| HARNESS, SLIT LINER DOOR OPTO SW II | 0140-38353 |
| HARN ASSY,DRIVER ENCODR HOME SENSORS | 0140-40239 |
| HARN ASSY, COOLDOWN CHAMBER | 0140-70234 |
| HARN ASSY, SMIF 24V KICK PANEL TO PCB | 0140-70413 |
| HARNESS ASSEMBLY, SMIF EMO INTERCONNECT | 0140-70414 |
| HARN ASSY, PH II FAC | 0140-70416 |
| DPS, POLY, HARNESS, CATHODE MAINT. | 0140-70500 |
| 0140-70524 | |
| HP ROBOOT CONTROL POWER CABLE HANNESS CABLE | 0140-70525 |
| HARN ASSY LOAD LOCK DOOR SENSORS | 0140-75000 |
| 0140-76127 | |
| HARNESS ASSY, INTERCONNECT CH. W/B | 0140-76222 |
| HARNESS, VHP TRANS CH DD MOTOR END | 0140-76327 |
| 0140-76833 | |
| H/A, SMIF INTEGRATED WB LLA INTRCNT PHAS | 0140-76877 |
| H/A, SMIF INTEGRATED WB LLB INTRCNT PHAS | 0140-76878 |
| 0150-00482 | |
| CABLE ASSY, 40FT, M/F EMO UMIBLICAL | 0150-00584 |
| CABLE ASSY.SMP RF MATCH CNTRL,SERIPLEX,C | 0150-00603 |
| 0150-00915 | |
| 0150-00947 | |
| 0150-00979 | |
| ASSY CABLE HEAT EXCHGR INTRFC | 0150-09027 |
| HARNESS ASSY LIMIT SWITC | 0150-09099 |
| CABLE ASSY, RF GENERATOR | 0150-09240 |
| CABLE ASSY,MAG GEN INTER CONNECT,55',ASP | 0150-09758 |
| CABLE ASSY, DISPLAY INTERCONNECT,ASP | 0150-09783 |
| CABLE,MOTOR DRIVE WXZ | 0150-10073 |
| MFC CBL 9-PIN | 0150-10232 |
| EV MANIFOLD CBL | 0150-10233 |
| CBL I/O PWR. DIST. | 0150-10328 |
| CABLE,LID/COVER INTERLOCK SW,DXZ | 0150-10454 |
| C/A, APC GAS PANEL CNTLR, INTC, 55FT EMC | 0150-10504 |
| CABLE ASSY, EMC, APC, GAS PANEL, COMM, | 0150-10505 |
| C/A, SYSTEM MONITOR, 55FT EMC COMP | 0150-10506 |
| CABLE ASSY, STEPPER X INTERCONNECT, 25' | 0150-20021 |
| CABLE ASSY, STEPPER Y INTERCONNECT, 25' | 0150-20022 |
| CABLE ASSY, CASSETTE INDEXER INTERCONNEC | 0150-20028 |
| CABLE ASSY, BUFFER ROBOT INTERCONNECT, 2 | 0150-20029 |
| CABLE ASSY, 24V POWER INTERCONNECT | 0150-20031 |
| CABLE ASSY, 15V POWER INTERCONNECT | 0150-20032 |
| CABLE ASSY. SUPPLY CONTROL | 0150-20061 |
| CABLE ASSY EMO MAIN AC TO SYSTEM AC | 0150-20074 |
| CABLE ASSY ORIENTER UMBILICAL | 0150-20102 |
| CABLE ASSY, EMO GENERATOR 1/2 INT. | 0150-20112 |
| CABLE ASSY, TURBO CONTROL BULKHEAD INT. | 0150-20126 |
| CABLE ASSY,EMO INTERCONN SYS. AC/MAIN FR | 0150-20181 |
| CABLE ASSY GAS DI/DO EXTERNAL INTERCONNE | 0150-20192 |
| HARNESS ASSY, TC INTERFACE | 0150-20197 |
| CABLE ASSY., FINAL VAL EXTERNAL INTL | 0150-20209 |
| CABLE ASSY,HEAT EXCHANGR | 0150-20227 |
| CABLE ASSY.,LLA LED PWR | 0150-20238 |
| CABLE ASSY., LLB LED PXR | 0150-20239 |
| CABLE ASSY,LLA WAFER MAP CASS.SENSE | 0150-20509 |
| CABLE ASSY,LLB WAFER MAP/CASS. SENSE | 0150-20510 |
| CABLE ASSY, VME CDGE DI/DO8 | 0150-20517 |
| CABLE ASSY,PUMP CONTROL CH C | 0150-20537 |
| CABLE ASSY,EMO MAIN AC TO SYS AC-75FT | 0150-20555 |
| CABLE ASSY, EMO INTCNT- 75FT | 0150-20556 |
| CABLE ASSY A/B PUMP STD INTF | 0150-20574 |
| CABLE ASSY MONOLITH PUMP | 0150-20575 |
| CABLE ASSY 2-PHS DRVR OUT MTR | 0150-20580 |
| CL ASSY PUMP INTFC CH D PC | 0150-20585 |
| CABLE ASSY SYS EXP FAIL INVTR DIO | 0150-20610 |
| CABLE ASSY SYS EXP FAIL INVTR SYSBACK | 0150-20611 |
| CABLE ASSY 2-PHASE DRIVER OUTPUT | 0150-20640 |
| CABLE ASSY FINAL VLV/INTLK DI REMOTE | 0150-20716 |
| CABLE ASSY GAS BOX INTERLOCK | 0150-20719 |
| CABLE ASSY 75' EXT INTERCONNECT | 0150-21082 |
| CABLE ASSY, CASSETTE INDEXER INTCNT-40FT | 0150-21129 |
| CABLE ASSY STEPPER DRIVER DIST. | 0150-21171 |
| CABLE ASSY DIRECT DRIVE BOX I/O | 0150-21183 |
| CABLE ASSY TOP TRANSFER | 0150-21184 |
| GAS INTERCONNECT | 0150-21338 |
| CHAMBER A/B INTERCONNECT, (EMC COMPLIANT | 0150-21339 |
| CHAMBER 2 INTERCONNECT | 0150-21340 |
| CHAMBER 3 INTERCONNECT, (EMC COMPLIANT) | 0150-21341 |
| CHAMBER 4 INTERCONNECT, (EMC COMPLIANT) | 0150-21342 |
| MAIN FRAME INTERCONNECT | 0150-21343 |
| CHAMBER D INTERCONNECT, (EMC COMPLIANT) | 0150-21344 |
| CRYO TEMP INTERCONNECT, (EMC COMPLIANT) | 0150-21345 |
| ENCODER INTERCONNECT, (EMC COMPLIANT) | 0150-21346 |
| ORIENTOR UMBILICAL, (EMC COMPLIANT) | 0150-21347 |
| SEC GENERATOR RACK INTERCONNECT, (EMC CO | 0150-21348 |
| CHAMBER C INTERCONNECT | 0150-21357 |
| CHAMBER C INTERCONNECT, (EMC COMPLIANT) | 0150-21358 |
| CABLE, ASSY DC POWER/INTERLOCK'S RGB | 0150-21366 |
| 0150-21367 | |
| CABLE ASSY REM DC PWR INTCON 75 FT | 0150-21418 |
| CABLE ASSY RF GEN DC PWR INTCON CEM 96 | 0150-21419 |
| CABLE ASSY REM 1 INTCON 75 FT -CEM 96 | 0150-21420 |
| CABLE ASSY REM 2 INTCON 75 FT -CEM 96 | 0150-21421 |
| CABLE ASSY MAIN FRAME PUMP CONT CEM 96 | 0150-21422 |
| CABLE ASSY 75' NESLAB INTCT CEM 96 | 0150-21423 |
| CABLE ASSY 75 FT TURBO CTRL CEM 96 | 0150-21424 |
| CABLE, GAS AO/AI EXTERNAL 50FT | 0150-21706 |
| 0150-21729 | |
| CABLE, STEPPER X-AXIS, 50FT | 0150-21764 |
| CABLE ASSY, HEAT EXCHANGER, 75FT | 0150-21767 |
| CABLE ASSY, GASBOX TO GASBOX INTERCONNEC | 0150-21772 |
| 0150-21776 | |
| 0150-21875 | |
| CABLE ASSY, WATER LEAK DET 2 GEN | 0150-21890 |
| C/A GROUND- SOURCE RETURN AND WATER MANI | 0150-22734 |
| HARNESS ASSY PNEUMATICS UMBILICAL | 0150-35209 |
| HARNESS ASSY CHAMBR A-B- C-D | 0150-35210 |
| C/A MAIN FRAME UMBILICAL CMJ2 LONG | 0150-35309 |
| C/A CBL COMB 20AWG LONG | 0150-35311 |
| C/A GAS PANEL POWER LONG | 0150-35314 |
| CABLE ASSY TC GAUGE CENTURA | 0150-35432 |
| CABLE ASSY, PC ENDPT CHA/B/C/D INTFC 15 | 0150-35447 |
| 0150-35665 | |
| C/A, EMC COMP., HEAT EXCHANGER, 75FT CSI | 0150-35740 |
| CABLE ASSY. DOME UMBILICAL #1 CENTURA | 0150-35999 |
| CABLE ASSY,RF MATCH CONTROL,DPS | 0150-36035 |
| CABLE ASSY,ESC HV INTERFACE,DPS | 0150-36036 |
| CABLE ASSY,TC INTERFACE,DPS | 0150-36037 |
| CABLE,RF MATCH CNTRL,SERIPLEX,DPS | 0150-36190 |
| CABLE,SERIPLEX COMM,SOURCE MATCH CNTRL | 0150-36476 |
| CABLE ASSY,FAC-PANEL TO E-DTCU | 0150-38927 |
| CABLE, COVER INTERLOCK - SLIT LINER DOOR | 0150-39000 |
| CABLE ASSY,DIAGNOSTIC,HE MATCH TO HV MOD | 0150-39389 |
| CABLE ASSY, N2 PURGE MFC PIGTAIL | 0150-76014 |
| EMC COMP.,HARNESS ASSY MAIN FRAME | 0150-76179 |
| EMC COMP.,25FT CABLE CHAMBER A-B-C-D | 0150-76184 |
| EMC COMP., CABLE ASSY, GAS PANEL #2 UMBI | 0150-76205 |
| EMC COMP.,CABLE ASSY,SYSTEM MONITOR,EXTE | 0150-76213 |
| EMC COMP., OPER PANEL, EXTENDED 46 FT. | 0150-76217 |
| CABLE ASSY, VHP TRANS CH MF DD MOTOR | 0150-76238 |
| CABLE ASSY, ANALOG SYNC EXT., FAST | 0150-76428 |
| CABLE ASSY, MAIN FRAME UMBILICAL #2,25.5 | 0150-76513 |
| CABLE, DRIVER I/O INTERCONNECT CENTURA | 0150-76657 |
| CABLE ASSEMBLY,ROBOT CONTROL 40FT. EMC C | 0150-76735 |
| C/A ROBOT CONTROL, 60FT.-EMC COMP | 0150-76758 |
| CABLE ASSY MF, PNEU DIST TO GAS INTLK, J | 0150-76816 |
| 0150-76833 | |
| 0150-76834 | |
| 0150-76836 | |
| CABLE ASSY, RF GEN DC PWR INTCNT, 50FT | 0150-76850 |
| 0150-76861 | |
| C/A SMIF INTRLOCK PCB TO KICKPANEL ASYST | 0150-76863 |
| C/A SMIF INTRLOCK PCB TO KICKPANEL ASYST | 0150-76864 |
| C/A SMIF INTRLOCK PCB TO KICKPANEL JENOP | 0150-76865 |
| C/A SMIF INTRLOCK PCB TO KICKPANEL JENOP | 0150-76866 |
| C/A 15 COND, UMBILICAL 40.00 FT., EMC CO | 0150-76870 |
| CABLE ASSY, 50 COND UMBILICAL, 40FT EMC | 0150-76871 |
| CABLE ASSY, 50 COND UMBILICAL, 60FT EMC | 0150-76873 |
| CABLE ASSY, TRANS CH MF DIR DRVR RSLVR 4 | 0150-97368 |
| 0620-02336 | |
| 0620-02383 | |
| 0620-02384 | |
| 0620-20403 |
| P/N | Description |
| 0020-34031 | SUPPORT, PEDESTAL,SHORTENED, SIMPLE CATH |
| 0020-34031 | SUPPORT, PEDESTAL,SHORTENED, SIMPLE CATH |
| 0020-34035 | SUPPORT, LIFT CYLINDER, SIMPLE CATHODE |
| 0020-34044 | BLOCK, RF INSULATOR, BOTTOM |
| 0040-31846 | COVER, ACCESS, HELIUM AND WATER LINES |
| 0040-31845 | COVER, CYLINDER SUPPORT |
| 0020-34030 | BASE,PEDESTAL,ESC,SIMPLE CATHODE |
| 0020-34034 | CYLINDER,LIFTER,ETCH CHAMBER |
| 0020-34048 | SUPPORT, BELLOWS |
| 0020-30347 | CYLINDER, EXTERNAL, |
| 0020-09029 | COVERING PIPE |
| 0040-09005 | BASE STD CATHODE NOT REPAIRABLE |
| 0200-10246 | UNI-INSERT,GDP,LINER,88 HOLD, QTZ |
| P/N | Description |
| 0010-09261 | BASIC CHAMBER 4,5,6" |
| 0040-09136 | CHAMBER 200MM BW |
| 0020-09999 | PLATE,FRONT,THROTTLE DR. |
| 0020-30335 | HOUSING,QTZ TUBE SACVD |
| 0020-10135 | MANIFOLD WATER PL |
| 0020-30102 | MANIFOLD, OUTPUT, SACVD |
| 0010-09341 | WAFER LIFT |
| 0040-09095 | GAS BOX ** |
| 0020-10192 | *RING WAFER LIFT 200MM |
| 0020-10119 | PLATE PERF 100-150M |
| 0020-09999 | PLATE,FRONT,THROTTLE DR. |
| 0020-10402 | PUMPING PLATE, 200MM |
| 0020-30335 | HOUSING,QTZ TUBE SACVD |
| 0020-10117 | PLATE PERF OXIDE 200MM |
| 3690-01676 | SCREW MACH SHLDR |
| 0040-09091 | GAS BOX 456PL |
| 0020-30108 | CLAMP SHIELD NITRIDE |
| 0020-30086 | PLATE PERFORATED 150MM NITRIDE GIANT GAP |
| 0020-10943 | ISOLATOR TEFLON 200MM |
| 0020-10721 | COVER,SCREW,TEFLON THIN PERF PLATE |
| 0020-10403 | PUMP PLATE 4",5"&6" SILANE/OX |
| 0020-10134 | MANIFOLD OUTPUT PL |
| 0020-09885 | ISOLATOR N |
| 0020-09602 | MANIFOLD INPUT |
| 0020-09307 | BUSHING, MOUNTING |
| 0020-30580 | BLOCKER PERF COM SIL4-6" |
| 0020-10936 | BLOCKER PLATE,SILANE 200MM |
| 0020-30797 | wPLATE PERF 200MM GIANT GAP NITRIDE |
| 0020-30090 | CLAMP,SHIELD 200MM |
| 0020-09135 | SUPPORT HINGE LMP MODULE |
| 0020-09270 | COVER FRONT |
| 0020-09307 | BUSHING, MOUNTING |
| 0020-09604 | HOUSING |
| 0020-09609 | BUSHING TERMINAL |
| 0020-10185 | SUPPORT HOOP 200MM |
| 0020-10186 | COVER TOP 200MM |
| 0020-10186 | COVER TOP 200MM |
| 0020-10759 | COVER, FRONT |
| 0021-10296 | OUTPUT MNFLD,UNIV CH.,W/ALIGN. HOLES |
| 0040-09096 | VACPORT/SLIT WDW/HINGE SUPPORT-THNGSTEN |
| 0040-09221 | CHAMBER 200MM SACVD |
| 0040-32073 | GAS BOX, UNIVERSAL LID,W/ALIGNMENT HOLES |
| 3880-01215 | WSHR FLAT .375OD X .161ID X .062THK |
| 3690-01676 | SCREW MACH SHLDR |
| 0020-10189 | PLATE CONNECTOR 200M |
| 0020-10192 | *RING WAFER LIFT 200MM |
| 0020-10936 | BLOCKER PLATE,SILANE 200MM |
| 0015-09055 | BELLOWS ASSY SUSCEPTORHOLLOW |
| 0015-09056 | BELLOWS ASSY WAFER SOLID |
| 0020-10059 | RING,WAFER LIFT RP 0020-09844/0020-09183 |
| 0020-34606 | PLATE,BLOCKER, .100 EH,UNIVERSAL CHAMBER |
| 0020-10943 | ISOLATOR TEFLON 200MM |
| 0040-09699 | CHAMBER, WXZ |
| 0020-30407 | PERF. PLATE 200MM BW |
| 0020-10190 | PLATE CONNECTOR SACVD / WB |
PART NO. |
Description |
| 0020-20295 | FRAME SOURCE 11.3" |
| 0020-20164 | COVER, INSULATOR SOURCE 11.3" |
| 0020-21486 | PLATE CONTACT DC SOURCE LEFT |
| 0020-21488 | PLATE CONTACT DC SOURCE RIGHT |
| 0020-23442 | water BOX &WATER LINE |
| 0020-23441 | BRKT PLUMBING MOTORIZED LIFT |
| 0020-20913 | HEATER AC BOX |
| 0020-20914 | COVER HTR AC PWR BOX |
| 0020-28258 | LIFTER HOOP |
| 0020-23208 | LIFTER FINGER |
| 0020-22547 | SOURCE ADAPTOR |
| 0240-20022 | EXTRA KITS |
| 0020-25198 | COVER RING ADV101 6" SST |
| 0021-20572 | PEDESTAL 6" ADV.101 FULL CVRG |
| 0240-25480 | RESET BUTTON KIT |
| 0020-23621 | SOURCE FRAME (G-12) |
| 0020-23286 | COVER, INSULATOR SOURCE (G-12) |
| 0020-22980 | PLATE CONTACT DC SOURCE LEFT |
| 0020-22979 | PLATE CONTACT DC SOURCE RIGHT |
| 0020-22983 | BRACKET PILLOW BLOCK |
| 0020-22982 | SOURCE ADAPTOR (G-12)-SUS |
| 0020-28364 | BLADE 6" ADV 101 SHUTTER |
| 0020-28392 | DISK,6" ADVANCED 101 SHUTTER |
| 0021-76708 | PEDESTAL CD/PT 150mm |
| 0020-21219 | BASE CD/PT 150mm |
| 0020-21222 | HOOP, CD/PT 150mm |
| 0020-20716 | FINGER, HOOP CD/PT 150mm |
| 0010-21867 | MANIFOLD PEDESTAL CD 150mm |
| 0020-27124 | PEDESTAL PC II 6" JMF/SMF |
| 0020-20895 | BASE HEATER 5/6" DEGAS |
| 0020-20896 | REFLECTOR HEATER 5/6" DEGAS |
| 0020-20897 | SOCKET RETAINER 5/6" DEGAS |
| 0020-20898 | COVER,ELECTRICAL 5/6" DEGAS |
| 0020-20899 | HEAT SHIELD, 5/6" DEGAS |
| 0020-20910 | BUSS BAR UPPER 5/6" (Ag) |
| 0020-20911 | BUSS BAR ,LOWER 5/6" (Ag) |
| 0020-21261 | GUIDE SHAFT ORIENTER |
| 0020-22363 | SHAFT,LIFTER, T/C |
| 0020-22910 | BASIC BELLOWS |
| 0020-20431 | COUMATOR 6" |
| 0020-20784 | TC HOLDER |
| 0020-23593 | PLATE 6" CCD VACUUM SEAL, REVISIED |
| 0020-21704 | CHUCK ORIENTER 5" |
| 0020-22362 | 6" LIFTER TC |
| 0020-22361 | PLATE TC BOX |
| 0020-20452 | CASSETTE STAGE ASS'Y (RH&LH)-AUTO |
| 0020-21112 | CLAMP, 6"BLADE BUFFER ROBOT |
| 0020-21113 | CAP 6" BUFFER ROBOT |
| 0020-21114 | BLADE, 6" BUFFER ROBOT |
| 0020-20354 | CAP,6" TRANSFER BLADE FROG LEG |
| 0020-21024 | CLAMP, 6"BLADE TRANSFER FROG LEG |
| 0020-21033 | BLADE, 6" TRANSFER FROG LEG |
| 0040-13378 | ROBOT ARM ASS,Y(HP PLUS) |
| 0020-21069 | HINGE |
| 0020-13126 | COVER DC,LOWER,FRAME RETAROANT (G-12) |
| 0020-76072 | ARM, WLDMT SOURCE CHMBR |
