TURBO PUMP AVAILABLE

MAG2000 FULL SET ( PUMP + CONTROLLER + CABLE )   * 3 SET

ET300WS  * 1ea

EW600WS * 2ea

AMAT SHUTTER ASSY-2nd source

AMAT SHUTTER ASSY

0010-21264   ASSEMBLY SHUTTER LINKAGE

0010-21393   ASSY, SHUTTER ROTATION, LINKAGE

0010-21578   SHUTTER ENCLOSURE W/SENSOR MODS

0010-21336   BAR ASSY, LINKAGE SHUTTER

If you have need more information or have any other inquiry, just feel free to contact me directly.

hkpark1015@gmail.com

MATTSON RTP 2800 & 2900 & 8800 Parts

Mattson RTP 2800 & 2900 Quartz Parts ( 2nd source )


58700001     QUARTZ TUBE   ( AST2800 )

58900072     QUARTZ TRAY   ( AST2800 )

57600002     GAS DISTRIBUTION 'R'   ( AST2800 )

57600004     GAS DISTRIBUTION 'T'   ( AST2800 )

58800003     QUARTZ ELBOW   ( AST2800 )

57000005     DOOR APERTURE   ( AST2800 )

58700015     QUARTZ TUBE   ( AST2900 )

57600002     GAS DISTRIBUTION PLATE 8" T   ( AST2900 )

57600004     GAS DISTRIBUTION PLATE 8" R   ( AST2900 )

58500012     QUARTZ PIN   ( AST2900 )

57100012     QUARTZ DOOR APERTURE   ( AST2900 )

58900145     BEARING PART   ( AST2900 )

58900146     WAFER TRAY   ( AST2900 )

58600069     QUARTZ PIPE   ( AST2900 )

Any interested in this article, please feel free to contact me directly.

hkpark1015@gmail.com