Fast Cool Down Ch# Parts available
0040-01101 Chamber Body
0040-04750 Chamber Lid
0040-04940 Lift Hoop
0035-00087 Wafer Lift Mounting Block
0020-39201 Mounting Block Cover
0021-08118 Water Cover
0040-04939 Pedestal Cool-down
0040-20133 Cool-down Flange
0021-03724 Center Finder Flange
0020-09064 Window Flange
0200-09005 Quartz Window
3020-01126 Air Cylinder
3220-01051 Floating Joint Coupling
3300-03408 Elbow Tubing Fitting
0020-33779 Housing Bushing
0020-20930 Bracket MAG Switch
